Visualization 2: Highly sensitive lateral deformable optical MEMS displacement sensor: anomalous diffraction studied by rigorous coupled-wave analysis
Chen Wang
Qianbo Lu
Jian Bai
Guoguang Yang
Kaiwei Wang
Dong Liu
Yongying Yang
10.1364/AO.54.008935.v002
https://opticapublishing.figshare.com/articles/media/Visualization_2_Highly_sensitive_lateral_deformable_optical_MEMS_displacement_sensor_anomalous_diffraction_studied_by_rigorous_coupled-wave_analysis/4899479
video2 Originally published in Applied Optics on 20 October 2015 (ao-54-30-8935)
2015-10-20 00:00:00
Visualization
deformable
ao
coupled-wave analysis video 2
Applied Optics
20 October 2015
MEMS displacement sensor
diffraction