Visualization 2: Highly sensitive lateral deformable optical MEMS displacement sensor: anomalous diffraction studied by rigorous coupled-wave analysis Chen Wang Qianbo Lu Jian Bai Guoguang Yang Kaiwei Wang Dong Liu Yongying Yang 10.1364/AO.54.008935.v002 https://opticapublishing.figshare.com/articles/media/Visualization_2_Highly_sensitive_lateral_deformable_optical_MEMS_displacement_sensor_anomalous_diffraction_studied_by_rigorous_coupled-wave_analysis/4899479 video2 Originally published in Applied Optics on 20 October 2015 (ao-54-30-8935) 2015-10-20 00:00:00 Visualization deformable ao coupled-wave analysis video 2 Applied Optics 20 October 2015 MEMS displacement sensor diffraction