Wang, Chen Lu, Qianbo Bai, Jian Yang, Guoguang Wang, Kaiwei Liu, Dong Yang, Yongying Visualization 2: Highly sensitive lateral deformable optical MEMS displacement sensor: anomalous diffraction studied by rigorous coupled-wave analysis video2 Originally published in Applied Optics on 20 October 2015 (ao-54-30-8935) Visualization;deformable;ao;coupled-wave analysis video 2;Applied Optics;20 October 2015;MEMS displacement sensor;diffraction 2015-10-20
    https://opticapublishing.figshare.com/articles/media/Visualization_2_Highly_sensitive_lateral_deformable_optical_MEMS_displacement_sensor_anomalous_diffraction_studied_by_rigorous_coupled-wave_analysis/4899479
10.1364/AO.54.008935.v002