%0 Online Multimedia %A Bellouard, Yves %A Said, Ali A. %A Bado, Philippe %D 2005 %T Media 2: Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica. %U https://opticapublishing.figshare.com/articles/media/Media_2_Integrating_optics_and_micro-mechanics_in_a_single_substrate_a_step_toward_monolithic_integration_in_fused_silica_/4932974 %R 10.1364/OPEX.13.006635.m002 %2 https://opticapublishing.figshare.com/ndownloader/files/8300666 %K substrate %K optic %K Integrating %K media %K oe %K Optics Express %K integration %K micro-mechanic %K 22 August 2005 %X Originally published in Optics Express on 22 August 2005 (oe-13-17-6635) %I Optica Publishing Group