Bellouard, Yves Said, Ali A. Bado, Philippe Media 8: Integrating optics and micro-mechanics in a single substrate: a step toward monolithic integration in fused silica. Originally published in Optics Express on 22 August 2005 (oe-13-17-6635) substrate;optic;Integrating;media;oe;Optics Express;integration;micro-mechanic;22 August 2005 2005-08-22
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10.1364/OPEX.13.006635.m008