Media 1: Energy flow in light-coupling masks for lensless optical lithography Olivier J. F. Martin Nicolas B. Piller Heinz Schmid Hans Biebuyck Bruno Michel 10.1364/OE.3.000280.m001 https://opticapublishing.figshare.com/articles/media/Media_1_Energy_flow_in_light-coupling_masks_for_lensless_optical_lithography/4951979 Originally published in Optics Express on 28 September 1998 (oe-3-7-280) 1998-09-28 00:00:00 lensles media flow 28 September 1998 Optics Express lithography light-coupling masks oe