J. F. Martin, Olivier Piller, Nicolas B. Schmid, Heinz Biebuyck, Hans Michel, Bruno Media 4: Energy flow in light-coupling masks for lensless optical lithography Originally published in Optics Express on 28 September 1998 (oe-3-7-280) oe;media;lensles;flow;28 September 1998;Optics Express;light-coupling masks;lithography 1998-09-28
    https://opticapublishing.figshare.com/articles/media/Media_4_Energy_flow_in_light-coupling_masks_for_lensless_optical_lithography/4952027
10.1364/OE.3.000280.m004