10.6084/m9.figshare.5693074.v1 Kimmo Saastamoinen Kimmo Saastamoinen Lasse-Petteri Leppänen Lasse-Petteri Leppänen Ismo Vartiainen Ismo Vartiainen Ari Tapio Friberg Ari Tapio Friberg Tero Setala Tero Setala 3046222.pdf Optica Publishing Group 2018 Supplemental material 2018-01-17 21:34:01 Journal contribution https://opticapublishing.figshare.com/articles/journal_contribution/3046222_pdf/5693074 Supplemental document on used methods, analysis and fabrication.