Eg2.mp4 (3.7 MB)
Visualization 2 - OPC variation process for Eg.2
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posted on 2019-05-13, 18:57 authored by Chen Xu, Xiaomin Lai, Dewen Cheng, Yongtian Wang, Kaihua WuThe changes from the initial system to the result for Eg. 2 in the paper "Automatic optical path configuration variation in off-axis mirror system design". The OPC starts from the axial form and ends in the desired off-axis unobscured form. With hybrid constraints, M1 and M3 become close enough to be fabricate on the same substrate.
