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Supplementary document for Influence of Temperature and Plasma Parameters on the Properties of PEALD HfO2 - 5223630.pdf

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journal contribution
posted on 07.06.2021, 17:20 by Margarita Lapteva, Vivek Beladiya, Sebastian Riese, Philipp Hanke, Felix Otto, Torsten Fritz, Olaf Stenzel, Andreas Tünnermann, Adriana Szeghalmi
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