Visualization 2 - OPC variation process for Eg.2
mediaposted on 13.05.2019, 18:57 by Chen Xu, Xiaomin Lai, Dewen Cheng, Yongtian Wang, Kaihua Wu
The changes from the initial system to the result for Eg. 2 in the paper "Automatic optical path configuration variation in off-axis mirror system design". The OPC starts from the axial form and ends in the desired off-axis unobscured form. With hybrid constraints, M1 and M3 become close enough to be fabricate on the same substrate.